An Overview of RF MEMS Components by Microwave Theory and Techniques

Rubi Khan

Abstract

This paper offers with a rather new location of radio-frequency (RF) technology primarilybased on microelectromechanical systems (MEMS). RF MEMS gives a class of new devicesand components which show advanced high-frequency performance relative to standard(commonly semiconductor) gadgets, and which enable new device abilities. Further, MEMSgadgets are designed and fabricated by means of techniques much like those of very massive-scale integration, and may be synthetic through traditional batch-processing strategies. Inthis paper, the simplest device addressed is the electrostatic micro switch—possibly theparadigm RF MEMS device. Thru its advanced performance characteristics, the micro switchis being developed in a number of current circuits and systems, which includes radio front-ends, capacitor banks, and time-delay networks. The superior overall performance combinedwith extremely-low-energy dissipation and big-scale integration must enable new systemfunctionality as well. Possibilities addressed right here are quasi-optical beam guidance andelectrically reconfigurable antennas.Keywords: antennas, microwave theory, large-scale integration, RF MEMS, semiconductor

An Overview of RF MEMS Components by Microwave Theory and Techniques

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