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28 articles for “Maskless lithography”
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SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems
Abstract: Two SU-8 based glass microfluidic devices are fabricated by maskless lithography and laboratory-made clamping. The inner walls of one device are coated with nano-layer of diamond like carbon (DLC) using the plasma enhanced chemical vapour deposition (PECVD) system. The other device is remained uncoated. A CMOS camera catching 25 frames per second with a corresponding time-scale resolution of 0.04 second is used to record each surface-driven microfluidic flow of dyed …
Published in International Journal of Nanomaterials and Nanostructures · Vol. 6, Issue 2, 2020 · pp. 60–63 Read article
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Experiments on the Passive Capillary Flow of Aqueous Ethanol in Sudden Expansion Microchannels towards the Applications in Nanofluidics and Nanoelectromechanical Systems
Abstract: In this work, total three individual sudden expansion microchannels are designed and fabricated by maskless lithography, hot embossing lithography and direct bonding technique inside the cleanroom laboratory. Polymethylmethacrylate (PMMA) is used as the selected polymer to fabricate these microchannels. Aqueous ethanol (15% ethanol, 85% dyed water) is prepared and used as dyed working liquid. Surface-driven (passive) capillary flow of prepared working liquid is recorded by a CMOS camera corresponding to …
Published in International Journal of Composite and Constituent Materials · Vol. 6, Issue 1, 2020 · pp. 15–22 Read article
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Dielectric Barrier Discharge Plasma Processing on Pristine PMMA Surfaces for Microfluidic Applications towards Applied Nanotechnology
Abstract: In this experimental work, a total of six individual microchannel bends as microfluidic devices are fabricated by maskless lithography, hot embossing lithography and direct bonding technique using polymethylmethacrylate (PMMA). Air dielectric barrier discharge (DBD) plasma processing is the selected surface modification technique in this particular experimental work. Dyed aqueous ethanol (10% ethanol, 90% dyed water) is the prepared working liquid to study the microfluidic flow characteristics. Effect of channel aspect …
Published in International Journal of Composite and Constituent Materials · Vol. 6, Issue 1, 2020 · pp. 1–7 Read article
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Experimental Demonstration on the Recording of Capillary-Filled Microfluidic Devices Fabricated by Polymeric Material
Abstract: In this present experimental work, total 52 individual PMMA microfluidic devices are fabricated by maskless lithography, hot embossing lithography and direct bonding technique in a cleanroom laboratory. The selected working liquids are dyed water, dyed aqueous ethanol and dyed aqueous isopropyl alcohol and are prepared in a materials-science laboratory. Fabricated microfluidic devices are tested by the prepared aqueous working liquids, and each capillary-filled device after the surface-driven microfluidic flow is …
Published in International Journal of Polymer Science and Engineering · Vol. 5, Issue 2, 2019 · pp. 31–41 Read article
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Experimental Studies on the Surface-Driven Microfluidic Flow of Dyed Working Liquids in Sudden Expansion Microchannels Fabricated by Polymer
Abstract: In this experimental work, the sudden expansion microchannels are fabricated by maskless lithography, hot embossing lithography, drilling, direct bonding technique and chip separation technique using own hands-on of author completely. Total 15 individual sudden expansion microchannels are fabricated in this work using polymethylmethacrylate (PMMA) as optically transparent polymer. Effects of channel aspect ratio, surface wettability and liquid viscosity on surface-driven microfluidic flow are experimentally studied in the fabricated sudden expansion …
Published in International Journal of Polymer Science and Engineering · Vol. 6, Issue 1, 2020 · pp. 44–59 Read article
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Short Report on the Effect of Atmospheric Dielectric Barrier Discharge Plasma Processing to Control the Capillary Flow in Polymer based Microfluidic Devices
Abstract: In this experimental work, a couple of microfluidic devices are fabricated by polymethylmethacrylate (PMMA) using the maskless lithography, hot embossing lithography and direct bonding technique. One device is fabricated by pristine PMMA, and the other device is fabricated by dielectric barrier discharge (DBD) plasma processed PMMA. Dyed water is selected and prepared as working liquid. Each surface-driven capillary flow of dyed water is recorded by a CMOS camera. This work …
Published in International Journal of Polymer Science and Engineering · Vol. 6, Issue 2, 2020 · pp. 1–4 Read article
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Short Report on the Polymer based Microfluidic Device Fabricated by Lithographic Techniques
Abstract: In this experimental work, a single microfluidic device is fabricated by maskless lithography, hot embossing lithography and direct bonding technique inside the cleanroom laboratory. Microchannel bend is the selected design to fabricate the microfluidic device. Dyed ethanol is selected and prepared as working liquid. The surface-driven capillary flow of dyed ethanol is recorded in the fabricated microchannel bend using a CMOS camera inside the materials-science laboratory. Effect of centrifugal force …
Published in International Journal of Polymer Science and Engineering · Vol. 6, Issue 2, 2020 · pp. 17–20 Read article
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Experimental Demonstration on Polymer based Microfluidics
Abstract: In this experimental work, a single polymer based gradual expansion microchannel is designed. This microchannel is fabricated by the maskless lithography, hot embossing lithography and direct bonding technique inside the cleanroom laboratory. Dyed water is the prepared working liquid in this work. The surface-driven (passive) microfluidic flow of dyed water is recorded in the fabricated device using a CMOS camera catching 25 frames per second with a corresponding time-scale resolution …
Published in International Journal of Polymer Science and Engineering · Vol. 7, Issue 1, 2021 · pp. 23–26 Read article