SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems

Subhadeep Mukhopadhyay

International Journal of Nanomaterials and Nanostructures

SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems

Subhadeep Mukhopadhyay

Abstract

Two SU-8 based glass microfluidic devices are fabricated by maskless lithography and laboratory-made clamping. The inner walls of one device are coated with nano-layer of diamond like carbon (DLC) using the plasma enhanced chemical vapour deposition (PECVD) system. The other device is remained uncoated. A CMOS camera catching 25 frames per second with a corresponding time-scale resolution of 0.04 second is used to record each surface-driven microfluidic flow of dyed water. This work may be suitable as an idea to fabricate the nanofluidic microelectromechanical systems (MEMS) in future

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How to cite

Subhadeep Mukhopadhyay. SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems. International Journal of Nanomaterials and Nanostructures. 2021;6(2):60–63.

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SU-8 Based Glass Microfluidic Device Coated with Deposited Nano-Layer for Future Fabrication of Nanofluidic Microelectromechanical Systems

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